Advanced Semiconductor Drying and Curing Oven with HEPA Filtration
Product Details
| Customization: | Available |
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| After-sales Service: | After-Sales Service Available |
| Warranty: | 1 Year |
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Basic Info.
- Model NO.
- Curing Oven
- Movement Way
- Fixed
- Flow
- Forced Convection Circulation and Ventilation
- Heating Mode
- SUS304 Stainless Steel Armoured Heating Tube
- Material Status
- Bulk
- Drying Medium
- Air
- Operation Pressure
- Atmospheric Pressure
- Operational Method
- Continuous
- Interior Structure
- Stainless Steel Plate
- Temp. Control
- Touch Screen + PLC, PLD Control
- Operation Function
- Auto Program Operation / Manual Operation
- Program Mode
- Able to Wite Multiple Production Programs
- Clean Class
- 100
- Transport Package
- Wood Case
- Specification
- Approx. 600kg
- Trademark
- ATEC
- Origin
- China
Packaging & Delivery
- Package Size
- 150.00cm * 150.00cm * 200.00cm
- Package Gross Weight
- 650.000kg
Product Description
Product Description
Clean class 100, Oxygen concentration below 50ppm, clean and anaerobic drying oven for semiconductor industry.
Operation· function
1.The max. operating temperature is 360ºC, clean class is 100 and oxygen concentration is below 50ppm.
2.Auto/Manual mode, easy operation, when the automatic program running, air exhaust, air inflow, oxygen concentration detection, temperature rise, treatment, cooling, etc. are fully automatic controlled, able to write multiple production programs, realize the one-touch operation.
3.Multiple heating methods such as inner chamber heating pipe, outer wall heating plate and N2 preheating drastically shorten the temperature rise time and improve the temperature distribution accuracy.
4.Inner wall water cooling heat exchanger and N2 cooling method drastically shorten the cooling time.
1.The max. operating temperature is 360ºC, clean class is 100 and oxygen concentration is below 50ppm.
2.Auto/Manual mode, easy operation, when the automatic program running, air exhaust, air inflow, oxygen concentration detection, temperature rise, treatment, cooling, etc. are fully automatic controlled, able to write multiple production programs, realize the one-touch operation.
3.Multiple heating methods such as inner chamber heating pipe, outer wall heating plate and N2 preheating drastically shorten the temperature rise time and improve the temperature distribution accuracy.
4.Inner wall water cooling heat exchanger and N2 cooling method drastically shorten the cooling time.
Safety·Protection
Equipped with multiple safety devices such as over current ELB, auto overheat protector in chamber, motor overload protection, vacuum pump overload protection, outer wall standalone overheat protector, N2 preheating standalone overheat protector, N2 pressure and flow abnormality, cooling water pressure and flow abnormality, oxygen concentration abnormality, door electromagnetic lock, manual lock knob of door, etc.
Equipped with multiple safety devices such as over current ELB, auto overheat protector in chamber, motor overload protection, vacuum pump overload protection, outer wall standalone overheat protector, N2 preheating standalone overheat protector, N2 pressure and flow abnormality, cooling water pressure and flow abnormality, oxygen concentration abnormality, door electromagnetic lock, manual lock knob of door, etc.
Specification
Curing Oven | |||
Model | SIG-230 | ||
System | Forced convection circulation and ventilation | ||
Performance | Operating temp. range | RT+30~360°C | |
Temp. adjusting accuracy | +0.3'C (at 360'C unloaded) | ||
Temp. distribution accuracy | +5'ºC (at 360'C unloaded) | ||
Temp. rise time | About 90min (RT 350°C) | ||
Temp. fall time | About 65min (350'→80°ºC) | ||
Clean class | 100 (at constant temp.) | ||
Oxygen concentration | 50ppm | ||
Vacuum degree | 1500Pa (no gas ballast), 2500Pa (with gas ballast) | ||
Structure | Interior | Stainless steel plate | |
Exterior | Cold rolled steel plate with chemical proofing coating | ||
Heatinsulating material | Aluminum silicate wool | ||
Heater | Inner chamber heating pipe 9KW Outer chamber wall heating plate 4.2KW N2 preheat heating pipe 1.0KW | ||
Blower fan blade/motor | Centrifugal fan blade p230x130 / three-phase motor 380v 50Hz 1400r/min 370W (pulley magnetic drive) fan blade, self-cooling hiah temp. motor 20V | ||
Water cooling heat exchanger | SUS304 coil heat exchanger | ||
Filter | HEPA high-temp. resistance high-efficiency fiter(filterability 0.3um particle> 99.97%) | ||
N2 inlet/outlet | Rc1/2 /NW25(vacuum pump air suction inlet), NW40 (waste gas exhaust outlet) | ||
Cooling water inlet/outlet | RC314 1 RC314-2 | ||
Test hole | NW16-3 | ||
Recorder | 2-channel paperless recorder | ||
Controller | Temp. control | Touch screen + PLC, PlD control | |
Operation function | Auto program operation / manual operation | ||
Program mode | Able to wite multiple production programs | ||
Heater circuit control | SSR drive | ||
Sensor | Kthermocouple (temp. controller and overheat protector) | ||
Safety device | over current ELB. auto overheat protector, motor overload protecion, vacuum pump overload protection. standalone overheat protector, N2 pressure and flow abnormality, cooling water pressure and flow abnormality, oxygen concentration abnormality, door electromagnetic lock, manual lock knob of door, etc. | ||
Specifications | Internal dimensions (WxDxHmm) | 660x500x660 | |
External dimensions (WxDxHmm) | 1300x1110x1750 | ||
Load-bearing of shelf plate | 20kg/pc | ||
Shelf plate pcs/shelf rest pitch | 19pcs/30mm | ||
Power source(50/60Hz) | 3 phase,AC380V 20KVA | ||
Weight | Approx.600kg | ||
Accessories | Shelf plate | Stainless steel stamping screen plate 2pcs | |
Shelf rest | 4pcs | ||
Centralized Control
Certifications
Our Services
Pre-sales Service
We can provide samples to help our customers evaluate our products. Our professional sales team offers comprehensive pre-sales support, including detailed product information and tailored solutions to meet customer requirements.
We can provide samples to help our customers evaluate our products. Our professional sales team offers comprehensive pre-sales support, including detailed product information and tailored solutions to meet customer requirements.
After-sales Service
We offer a one year warranty for our products, during which we provide free spare parts and video guidance for installation and maintenance. Our team is available to assist with any issues that arise. If the product is damaged due to manufacturing defects, we will provide free repair or replacement. However, if the damage is caused by improper handling by the customer, the associated costs must be covered by the customer.
We offer a one year warranty for our products, during which we provide free spare parts and video guidance for installation and maintenance. Our team is available to assist with any issues that arise. If the product is damaged due to manufacturing defects, we will provide free repair or replacement. However, if the damage is caused by improper handling by the customer, the associated costs must be covered by the customer.
Customization Service
We support customization, including functionality, structure, style, and color, to meet the specific requirements of different customers. For detailed information, please feel free to contact us.
We support customization, including functionality, structure, style, and color, to meet the specific requirements of different customers. For detailed information, please feel free to contact us.
Partnership Opportunities
We welcome collaboration with local agents and distributors to expand our market reach and support mutual growth.
We welcome collaboration with local agents and distributors to expand our market reach and support mutual growth.
Comprehensive Environmental Testing Solutions
We provide a full range of environmental and reliability testing equipment to simulate extreme conditions and ensure product durability. Our solutions include:
High and Low Temperature Environmental Chambers
Rapid Temperature Change Chambers
Thermal Shock Test Chambers
High and Low Pressure Chambers
Walk-in Environmental Test Chambers
Vibration Test Chambers
Rain Test Chambers
Sand and Dust Test Chambers
Environmental Test Ovens
Fuel Cell Test Equipment
Electrolyzer Testing Systems
Various Material Testing Equipment
Rapid Temperature Change Chambers
Thermal Shock Test Chambers
High and Low Pressure Chambers
Walk-in Environmental Test Chambers
Vibration Test Chambers
Rain Test Chambers
Sand and Dust Test Chambers
Environmental Test Ovens
Fuel Cell Test Equipment
Electrolyzer Testing Systems
Various Material Testing Equipment
Our advanced testing solutions help industries ensure compliance with international standards, enabling precise performance evaluation under harsh conditions. Contact us today to find the ideal testing solution for your needs!
Company Profile
ATEC not only researches and develops, designs, and manufactures the whole series of climatic environmental testing equipment but also provides solutions for various kinds of climatic and environmental simulation testing engineering. The main products include high-/low-temperature humidity chamber, temperature shock chamber, low-pressure chamber, chamber combined with temperature/humidity/vibration, single-shaft and multi-shaft rotary temperature chamber, rainfall/dust/light/salt spray environment simulation system, vehicle climate/environment simulation and detection system, multi-factor environment simulation system, and various kinds of non-standard testing systems, etc.
ATEC was honored as "national high-tech enterprise" and provided with the innovation funds from the State Scientific and Technological Commission. It has several technical patents, passes ISO9001:2008 quality management system certification, and can produce environment testing equipment that conforms to various kinds of international standards, such as MIL, IEC, and DIN. The products are widely applied in national key laboratories and large-scaled third-party testing laboratories involving aviation, aerospace, armament, vessel, automobile, intelligent manufacturing, new energy, measurement electronics, railway, health care, academic institutions, and many other important fields of the national economy.
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